

@mastersthesis {6748,
	title = {Properties of organic and metalorganic molecules on silicon(100)-2 x 1 and at silicon/titanium carbon nitride interface},
	year = {2006},
	note = {3205440},
	school = {University of Delaware},
	type = {phdPh.{D}.},
	address = {Ann Arbor},
	abstract = {Surface science has been studied throughout history. The spontaneous spreading of oil on water is one well-known phenomenon that was observed early in ancient times. Some understanding of another surface process, friction, was demonstrated by Leonardo da Vinci. A massive amount of research that describes problems important to surface-chemistry-based technologies was started with such a scientific approach. A surface is a place where phases meet. This is why surfaces are inherently different from the rest of the solid in their unsatisfied bonding abilities. Surface science is composed of many different areas and has become particularly important to the industry of microelectronics and nanotechnology. Chemical reactivity and material properties at the molecular level have to be understood in order for semiconductor processing to advance to even smaller dimensions. Si(100) surface and Si/TiCN interface are of a great importance to the contemporary industrial applications. Various molecules have been studied on these specimens in the framework of this dissertation. One of the fields that play an important role in surface science is the study of ordered adsorbed species. Originally, the way to satisfy the demand on constantly decreasing structured entities was investigated because the size starts playing a significant role in the commercial success of a device. Eventually, scaling down reached the atomic level where single molecules are supposed to be utilized as {\textquoteright}wires{\textquoteright}, {\textquoteright}switches{\textquoteright} and so on. Now, there is a need to understand the processes happening with species adsorbed on a surface in order to realize modern engineering ambitions. There are several special problems that have to be addressed by the scientific community to support these ambitions. This thesis will address two types of problems associated with {\textquoteright}scaling down{\textquoteright}: (1) surface specific binding on a Si(100) surface and (2) chemical behavior of a thin diffusion barrier layer. In both cases, the researcher{\textquoteright}s attention is brought to an interface, or two-dimensional geometrical boundary between the phases, as it is the most important part of a system in the surface studies. Species adsorbed on the interface can be probed in a number of different ways. Techniques used in our studies will be described in detail in the next chapter; here, it will be noted only that a method chosen for the surface analysis has certain implications by itself both for the kind of information which can be received in the investigation and for the impact made on the species analyzed. (Abstract shortened by UMI.)},
	keywords = {0494:Chemistry, Chemistry, Metal-organic, Pure sciences, Silicon, Titanium carbon nitride},
	url = {http://search.proquest.com/docview/305323152?accountid=14270},
	author = {Bocharov, Semyon}
}
